Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
By means of the hybrid FEM-BEM method formulated by Koehler and Fredkin (IEEE Trans. Magn. 28 (1992) 1239), we have simulated a transverse biased initial susceptibility (TBIS) experiment in a 3D system. We discuss the relationship between the anisotropy fields obtained from the TBIS simulations by using the Hoffmann's ripple theory and the characteristics of the microstructure of the system. © 2001 Elsevier Science B.V. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Physical Review B
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IEEE T-MTT
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