Time-resolved temperature measurements during pulsed laser irradiation using thin film metal thermometers

Abstract

In this article, we describe a technique using NiSi and Pt thin film metal thermometers to provide accurate temperature information on a nanosecond time scale during pulsed laser processing of materials. A surface layer of interest is deposited onto the thermometer layer, and temperatures are determined from temperature dependent changes in the metal film's resistance. Details concerning the design and fabrication of the device structure and experimental considerations in making nanosecond resolved resistance measurements are discussed. Simple analytical estimates are presented to extract quantities such as incident laser energy stored in the sample. Finally, transient temperature data in the thermometer film, in combination with heat flow calculations, allow temperature determination as a function of time and depth into the sample and, additionally, can provide information about material properties of the surface layer.