Publication
M&M 2006
Conference paper

Three-dimensional imaging of nano-voids in copper interconnects using incoherent bright field (IBF) tomography

Download paper

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Date

Publication

M&M 2006

Authors

Resources

Share