Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Thermomechanical distortions of the PREVAIL mask system during exposure

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Finite element methods were used to mode both the thermal and structural response of the PREVAIL prototype mask during exposure heating. Equivalent modeling techniques were used to simulate a variety of pattern density distributions. Temperature rises of 3.8 K were observed in membranes immediately after e-beam exposure. Errors in stitching in both horizontally and vertically adjacent subfields were determined.