Thermomechanical distortions of the PREVAIL mask system during exposure

Abstract

Finite element methods were used to mode both the thermal and structural response of the PREVAIL prototype mask during exposure heating. Equivalent modeling techniques were used to simulate a variety of pattern density distributions. Temperature rises of 3.8 K were observed in membranes immediately after e-beam exposure. Errors in stitching in both horizontally and vertically adjacent subfields were determined.