Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films