William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications