M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Alternating copolymers of styrene with β‐carboalkoxy‐substituted t‐butyl α‐cyanoacrylates undergo facile deesterification at 150–190°C, about 60°C below the deprotection temperature of poly(t‐butyl methacrylate), and decarboxylation at 170–200°C. When the β‐substituent is a methyl ester, the two events are clearly separated, with the deesterification occurring at a maximum rate at 165°C and decarboxylation at 193°C. Anhydride formation is negligible in this case. The copolymer with t‐butyl cyanofumarate exhibits simultaneous deesterification and decarboxylation events at 180°C with concomitant minor dehydration. Copyright © 1989 John Wiley & Sons, Inc.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
A. Krol, C.J. Sher, et al.
Surface Science
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Eloisa Bentivegna
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