Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Paper
The self-assessment trap: Can we all be better than average?
Related
A.R. Conn, Nick Gould, et al.
Mathematics of Computation
Trang H. Tran, Lam Nguyen, et al.
INFORMS 2022
Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000