Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Fundamental physical considerations indicate that the scaling of devices that use electron charge as the information carrier will limit within the next one to two decades. The Nanoelectronics Research Initiative (NRI), a joint industry-government program, has been developed to fund university research seeking devices that utilize alternative physical information carriers or non-equilibrium switching mechanisms to continue the historical cost and performance trends of information technology. Three research centers have been established to pursue five research vectors that have been identified as critical to the effort to replace the electronic switch. A brief history and rationale for NRI is given and the projects currently underway are described in the context of the five research vectors. © 2007 Springer Science+Business Media B.V.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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SCML 2024
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