V. Narayanan, V.K. Paruchuri, et al.
VLSI Technology 2006
Paper
The IBM computer-stem system
Abstract
The system of computer control of STEM operation for EELS acquisition is described. The ability to obtain analytical information from 1 nm sized areas during a 15 min integration time is illustrated. The system of hardware and software is discussed in general terms to highlight the organizational philosophy which allows complex and adaptable behavior with a minimum of construction effort. © 1982.
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