T.S. Kuan, P.E. Batson, et al.
IBM J. Res. Dev
The system of computer control of STEM operation for EELS acquisition is described. The ability to obtain analytical information from 1 nm sized areas during a 15 min integration time is illustrated. The system of hardware and software is discussed in general terms to highlight the organizational philosophy which allows complex and adaptable behavior with a minimum of construction effort. © 1982.
T.S. Kuan, P.E. Batson, et al.
IBM J. Res. Dev
P.E. Batson
Proceedings of SPIE 1989
P.E. Batson
Microscopy and Microanalysis
P.E. Batson
Journal of Electron Microscopy