P.E. Batson
Physical Review Letters
The system of computer control of STEM operation for EELS acquisition is described. The ability to obtain analytical information from 1 nm sized areas during a 15 min integration time is illustrated. The system of hardware and software is discussed in general terms to highlight the organizational philosophy which allows complex and adaptable behavior with a minimum of construction effort. © 1982.
P.E. Batson
Physical Review Letters
V. Narayanan, V.K. Paruchuri, et al.
VLSI Technology 2006
P.E. Batson
MSA Annual Meeting 1993
A.C. Callegari, K. Babich, et al.
ECS Meeting 2007