Aberration correction results in the IBM STEM instrument

Abstract

Results from the installation of aberration correction in the IBM 120kV STEM argue that a sub-angstrom probe size has been achieved. Results and the experimental methods used to obtain them are described here. Some post-experiment processing is necessary to demonstrate the probe size of about 0.078nm. While the promise of aberration correction is demonstrated, we remain at the very threshold of practicality, given the very stringent stability requirements. © 2003 Elsevier B.V. All rights reserved.