Publication
Journal of Applied Physics
Paper

The growth of nitrided surface layers by ion bombardment

View publication

Abstract

It is shown that bombardment of a tungsten surface with 300- and 450-eV nitrogen ions produces an altered surface layer whose saturation concentrations are 8×1015 and 9×1015 nitrogen atoms/cm 2, respectively. Mechanisms involved in the formation and decomposition of these surface layers are discussed. © 1972 The American Institute of Physics.

Date

10 Nov 2003

Publication

Journal of Applied Physics

Authors

Share