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Journal of Applied Physics
Paper

The growth of nitrided surface layers by ion bombardment

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Abstract

It is shown that bombardment of a tungsten surface with 300- and 450-eV nitrogen ions produces an altered surface layer whose saturation concentrations are 8×1015 and 9×1015 nitrogen atoms/cm 2, respectively. Mechanisms involved in the formation and decomposition of these surface layers are discussed. © 1972 The American Institute of Physics.

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Journal of Applied Physics

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