The Effect of Silicon Wafer Imperfections on Minority Carrier Generation and Dielectric Breakdown in MOS Structures

Kafai Lai, Alan E. Rosenbluth, et al.

SPIE Advanced Lithography 2007

Zelek S. Herman, Robert F. Kirchner, et al.

Inorganic Chemistry

Heinz Schmid, Hans Biebuyck, et al.

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Michael Ray, Yves C. Martin

Proceedings of SPIE - The International Society for Optical Engineering