Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The elastic contact of a plate with two axisymmetric bodies, generally of dissimilar elastic properties and curvatures, is considered. The solution of the resulting two integral equations is given as a truncated- series of Legendre polynomials of even order whose coefficients may be determined from a system of linear algebraic equations. The relationships between the total load, radii of curvature of the bodies, contact radii, approach, radial displacements, maximum contact stress, and the plate thickness can then be computed in terms of these coefficients. Numerical compulations have been carried out for the contact of a plate with two identical spheres. © 1964 by ASME.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
David B. Mitzi
Journal of Materials Chemistry