Yu Jin Jang, Yoon Hee Jang, et al.
Macromolecular Rapid Communications
Nanopores created by micellar star polymers in amorphous organic silsequioxane thermosets produce morphologically controlled porous materials for semiconductor chip applications (see picture). Pore size is independent of concentration and processing conditions, but depends solely on the size of the polymer molecule.
Yu Jin Jang, Yoon Hee Jang, et al.
Macromolecular Rapid Communications
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Illan J. Kramer, David Zhitomirsky, et al.
Advanced Materials
V.P. Chuang, W. Jung, et al.
Journal of Applied Physics