Conference paperAnomalous interface degradation of a-Si:H TFTs during LCD lifetimeFrank R. Libsch, Takatoshi TsujimuraActive Matrix Liquid Crystal Displays Technology and Applications 1997
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PaperKinetic model for the chemical vapor deposition of tungsten in the silane reduction processJulian J. HsiehJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films