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PaperSequential Lateral Solidification of Silicon Thin Films on Cu BEOL-Integrated Wafers for Monolithic 3-D IntegrationFabio Carta, Stephen M. Gates, et al.IEEE T-ED
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PaperAdsorption kinetics of SiH4, Si2H6 and Si3H8 on the Si(111)-(7×7) surfaceStephen M. GatesSurface Science
