Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME