PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsPaperSummary Abstract: Theoretical investigations of fluorine-silicon systemsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1988PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsAuthorsChris G. Van de WalleY. Bar-YamF.R. McfeelyS.T. PantelidesIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare
