A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
Paper
Summary Abstract: Reactive ion-etching-related Si surface residues and subsurface disorder
Abstract
No abstract available.
Related
Michiel Sprik
Journal of Physics Condensed Matter
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting