PublicationJVSTAPaperSummary Abstract: Plasma potentials of 13.56 MHz rf argon glow discharges in a planar systemJVSTAView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1985PublicationJVSTAAuthorsK. KehlerJ.W. CoburnD.E. HorneE. KayJ. KellerIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare
