Summary Abstract: Plasma potentials of 13.56 MHz rf argon glow discharges in a planar system

K.A. Chao

Physical Review B

Andreas C. Cangellaris, Karen M. Coperich, et al.

EMC 2001

P. Alnot, D.J. Auerbach, et al.

Surface Science

Lawrence Suchow, Norman R. Stemple

JES