Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Paper
Summary Abstract: Modification of metals by low energy ions during thin film deposition
Abstract
No abstract available.
Related
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering