A. Gangulee, F.M. D'Heurle
Thin Solid Films
Paper
Summary Abstract: Microstructure and electrical conductivity of plasma deposited gold/fluorocarbon composite films
Related
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007