Spectral characteristics of multilayer cobalt - carbon mirrors for the λ ≈ 7.5 nm range

Abstract

Multilayer cobalt - carbon mirrors on Si(111) substrates were made by electron-beam deposition and polishing of the metal layers by Kr+ ion bombardment. A new spectroscopic method was developed for estimating the parameters of plane multilayer x-ray mirrors by illuminating a sample with broad-band radiation from a laser-plasma source and by subsequent dispersion of this radiation with a diffraction grating operating in the transmission mode.