Conference paper
Multilayer mirrors for x-ray lithography
E. Spiller
MRS Spring Meeting 1993
Multilayer cobalt - carbon mirrors on Si(111) substrates were made by electron-beam deposition and polishing of the metal layers by Kr+ ion bombardment. A new spectroscopic method was developed for estimating the parameters of plane multilayer x-ray mirrors by illuminating a sample with broad-band radiation from a laser-plasma source and by subsequent dispersion of this radiation with a diffraction grating operating in the transmission mode.
E. Spiller
MRS Spring Meeting 1993
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ApJ
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