About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
Opt. Eng.
Paper
DETERMINATION OF THICKNESS ERRORS AND BOUNDARY ROUGHNESS FROM THE MEASURED PERFORMANCE OF A MULTILAYER COATING.
Abstract
The influence of thickness errors and boundary imperfections on the performance of a multilayer x-ray mirror is discussed. It is shown that both can be obtained separately from a measured reflectivity curve at a short x-ray wavelength. Multilayers have reduced scattering compared to single films, and for this reason rough boundaries and gradual transition layers between the film materials give practically identical performance. A simple Debye-Waller factor is not sufficient to describe the performance of a multilayer with many layers at short wavelengths.