Janos Kirz, David Sayre
Nuclear Inst. and Methods in Physics Research, A
We point out the advantages of the use of x-ray resist as the recording medium in contact x-ray micrography, with subsequent viewing under the scanning electron microscope. Untreated specimens may be replicated with a resolution better than 100 nm. Photographs of latex spheres obtained by this technique are presented.
Janos Kirz, David Sayre
Nuclear Inst. and Methods in Physics Research, A
Eberhard Spiller, Daniel Stearns, et al.
Journal of Applied Physics
Robert S. Nelson, Zoran L. Barbaric, et al.
Proceedings of SPIE 1989
Eberhard Spiller, John Harper
Applied Optics