Y. Vladimirsky, E. Kallne, et al.
Proceedings of SPIE 1989
We point out the advantages of the use of x-ray resist as the recording medium in contact x-ray micrography, with subsequent viewing under the scanning electron microscope. Untreated specimens may be replicated with a resolution better than 100 nm. Photographs of latex spheres obtained by this technique are presented.
Y. Vladimirsky, E. Kallne, et al.
Proceedings of SPIE 1989
Rolf-Peter Haelbich, Armin Segmüller, et al.
Applied Physics Letters
Eberhard Spiller
Journal of Applied Physics
Eberhard Spiller, Kurt Grebe, et al.
Proceedings of SPIE 1989