Conference paper
Recent applications of laser-produced plasma x-ray sources
Robert W. Eason, David K. Bradley, et al.
Proceedings of SPIE 1989
We point out the advantages of the use of x-ray resist as the recording medium in contact x-ray micrography, with subsequent viewing under the scanning electron microscope. Untreated specimens may be replicated with a resolution better than 100 nm. Photographs of latex spheres obtained by this technique are presented.
Robert W. Eason, David K. Bradley, et al.
Proceedings of SPIE 1989
Eberhard Spiller
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Eberhard Spiller
Journal of Applied Physics
Eberhard Spiller
Nuclear Inst. and Methods in Physics Research, A