Eberhard Spiller
Proceedings of SPIE 1989
We point out the advantages of the use of x-ray resist as the recording medium in contact x-ray micrography, with subsequent viewing under the scanning electron microscope. Untreated specimens may be replicated with a resolution better than 100 nm. Photographs of latex spheres obtained by this technique are presented.
Eberhard Spiller
Proceedings of SPIE 1989
Ralph Feder, Veronica Banton, et al.
Science
Eberhard Spiller, Armin Segmüller, et al.
Applied Physics Letters
Eberhard Spiller
SPIE San Diego 1991