Janos Kirz, Harald Ade, et al.
Physica Scripta
We point out the advantages of the use of x-ray resist as the recording medium in contact x-ray micrography, with subsequent viewing under the scanning electron microscope. Untreated specimens may be replicated with a resolution better than 100 nm. Photographs of latex spheres obtained by this technique are presented.
Janos Kirz, Harald Ade, et al.
Physica Scripta
Eberhard Spiller, Daniel Stearns, et al.
Journal of Applied Physics
Eberhard Spiller
SPIE San Diego 1991
Ivan Haller, Ralph Feder, et al.
JES