Eberhard Spiller
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
We point out the advantages of the use of x-ray resist as the recording medium in contact x-ray micrography, with subsequent viewing under the scanning electron microscope. Untreated specimens may be replicated with a resolution better than 100 nm. Photographs of latex spheres obtained by this technique are presented.
Eberhard Spiller
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ivan Haller, Ralph Feder, et al.
JES
Eberhard Spiller
Proceedings of SPIE 1989
Eberhard Spiller, Leon Golub
Applied Optics