Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
T. Graham, A. Afzali, et al.
Microlithography 2000
Michael E. Henderson
International Journal of Bifurcation and Chaos in Applied Sciences and Engineering