Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Measured lifetimes, heating powers and brightnesses are presented for the lanthanum hexaboride rod cathode electron gun together with estimated lifetimes for several operating brightnesses. A detailed description of the cathode structure is given and the effects of poor vacua on the cathode performance are discussed.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
K.N. Tu
Materials Science and Engineering: A
T.N. Morgan
Semiconductor Science and Technology
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS