Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A new series of all para polyterephthalamides that exhibits the unexpected ability to redissolve in polar aprotic solvents and high thermal stability were prepared. Thin films of the polymers were made and all of the polymers yielded tough, fingernail creasable films. Several of the polymer films are transparent and colorless.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
K.N. Tu
Materials Science and Engineering: A
R. Ghez, J.S. Lew
Journal of Crystal Growth