Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A new series of all para polyterephthalamides that exhibits the unexpected ability to redissolve in polar aprotic solvents and high thermal stability were prepared. Thin films of the polymers were made and all of the polymers yielded tough, fingernail creasable films. Several of the polymer films are transparent and colorless.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Lawrence Suchow, Norman R. Stemple
JES
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter