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Publication
Proceedings of SPIE 1989
Conference paper
Solid state electron beam chemistry
Abstract
A brief account is presented on an approach for a quantitative understanding of solid state electron beam chemistry that is directed towards understanding the radiation sensitivity of electron beam resists. Results obtained by irradiating PVA with and without additives, using a 25 kV electron beam, are shown in order to investigate the possible spherical and chemical mechanisms induced by the electron beam. © 1983 SPIE.