Sharon R. Jelinsky, Barry Welsh, et al.
Proceedings of SPIE 1989
Multilayer coatings consisting of very smooth ReW and carbon films used as near-normal-incidence reflectors show theoretical performance in the 150-200-Å wavelength region and should allow the fabrication of useful normal-incidence mirrors for wavelengths as short as 50 Å.
Sharon R. Jelinsky, Barry Welsh, et al.
Proceedings of SPIE 1989
S.G. Lee, G. Koren, et al.
Applied Physics Letters
Robert S. Nelson, Reuven D. Zach, et al.
Proceedings of SPIE 1989
Eberhard Spiller
SPIE San Diego 1991