Neeraj Khare, P. Chaudhari
Applied Physics Letters
Paper
Simulation of structural anisotropy and void formation in amorphous thin films
Abstract
We have computer simulated the structure of thin amorphous films grown from a vapor. Our hard-sphere model shows that structural anisotropy and voids are a natural occurrence of the deposition process. The amount of unfilled space (voids) and the anisotropy have been studied as a function of the angle of incidence of the vapor stream upon the substrate. © 1974 American Institute of Physics.
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