Publication
Applied Physics Letters
Paper

Simulation of structural anisotropy and void formation in amorphous thin films

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Abstract

We have computer simulated the structure of thin amorphous films grown from a vapor. Our hard-sphere model shows that structural anisotropy and voids are a natural occurrence of the deposition process. The amount of unfilled space (voids) and the anisotropy have been studied as a function of the angle of incidence of the vapor stream upon the substrate. © 1974 American Institute of Physics.

Date

09 Oct 2003

Publication

Applied Physics Letters

Authors

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