E. T. Todd Ryan, Stephen M. Gates, et al.
Journal of Applied Physics
Paper
Silicon Chemical Vapor Deposition One Step at a Time: Fundamental Studies of Silicon Hydride Chemistry
Abstract
No abstract available.
Related
Joseph M. Jasinski, Joan K. Frisoli, et al.
The Journal of Chemical Physics
Joseph M. Jasinski
Journal of Physical Chemistry
E. Todd Ryan, Stephen M. Gates, et al.
Journal of Applied Physics