Silicon Chemical Vapor Deposition One Step at a Time: Fundamental Studies of Silicon Hydride Chemistry

Alfred Grill, Stephen M. Gates, et al.

Applied Physics Reviews

Stephen M. Gates, Roderick R. Kunz, et al.

Surface Science

Marcus A. Worsley, Stacey F. Bent, et al.

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Jack O. Chu, David B. Beach, et al.

Journal of Physical Chemistry