PublicationAccounts of Chemical ResearchPaperSilicon Chemical Vapor Deposition One Step at a Time: Fundamental Studies of Silicon Hydride ChemistryAccounts of Chemical ResearchView publicationAbstractNo abstract available.Home↳ PublicationsDate01 May 2002PublicationAccounts of Chemical ResearchAuthorsJoseph M. JasinskiStephen M. GatesIBM-affiliated at time of publicationShare
