A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Paper
Sets recognized by n-tape automata
Abstract
No abstract available.
Related
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Jonathan Ashley, Brian Marcus, et al.
Ergodic Theory and Dynamical Systems
Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989