Publication
Makromolekulare Chemie. Macromolecular Symposia
Paper

Sensitive resist systems based on acid‐catalyzed polymer reactions

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Abstract

Acid‐catalyzed polymer reactions have been successfully utilized in the design of chemical amplification resist systems for semiconductor manufacturing. In this paper are described preparation and acid‐catalyzed depolymerization reactions of α‐substituted polystyrenes. Copyright © 1992 Hüthig & Wepf Verlag

Date

02 Mar 2011

Publication

Makromolekulare Chemie. Macromolecular Symposia

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