Self-adjusted permanent attachment of fibres to gaas waveguide components

Abstract

We present a self-aligned flip-chip mounting technique for permanent coupling of single-mode fibres to rib waveguides By help of reactive-ion-etched alignment ribs and preferentially etched silicon V-grooves, self-adjusted alignment with excess coupling loss as low as 0.3 dB has been achieved. © 1986, The Institution of Electrical Engineers. All rights reserved.