Wilhad Reuter, Gerald J. Scilla
Analytical Chemistry
CF3+ has been extracted from a cold cathode Ion gun supplied with a CF4/N2 gas mixture. A CF3+ beam current of about 200 nA Is obtained, which Is about a factor of 5 smaller than the ~1 µA O2+ beam currents obtainable from conventional oxygen Ion sources. This decrease Is partially offset by the higher sputter yields obtained with CF3+. Ionization probabilities are higher or equal to those found for O2+ bombardment. Composition and chemical state analyses were performed after saturation bombardment. Generally metal carbides are found to have formed with a fluorine uptake of about 10-20 atom %. The fluorine Is bonded to the metal. Matrix effects are smaller under O2+ bombardment due to the low fluorine concentration. © 1987, American Chemical Society. All rights reserved.
Wilhad Reuter, Gerald J. Scilla
Analytical Chemistry
Bernard L. Gilbert, Bert L. Olson, et al.
Analytical Chemistry
Ming L. Yu, Wilhad Reuter
Journal of Applied Physics
Wilhad Reuter, J.G. Clabes
Analytical Chemistry