L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
The use of scaling concepts in understanding growth by molecular beam epitaxy (MBE) is increasingly important these days. Here we present a critical discussion on the advantages and disadvantages of kinetic theories and continuum models, two main methods frequently used to study the roughening and scaling of surfaces grown by MBE. Finally, some open problems faced by these approaches are also discussed.
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008