Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Rotational polarization of NO molecules scattered from a Ag(111) surface has been computed using classical trajectory calculations. It appears that the rotational polarization strongly depends on the initial rotational temperature of the NO beam. The depolarization experimentally observed at low J can be explained. © 1985.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Lawrence Suchow, Norman R. Stemple
JES
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
Robert W. Keyes
Physical Review B