Microelectronic Engineering
Paper
01 Jan 1985

Resist materials

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Abstract

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Date

01 Jan 1985

Publication

Microelectronic Engineering

Authors

  • Scott A. MacDonald
  • Jean M.J. Frechet
  • Hiroshi Ito
  • C Grant Willson
IBM-affiliated at time of publication

Topics

  • Physical Sciences

Resources

  • Publication

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