Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Exact recursive formulas are derived for the state probabilities in priority queueing systems (preemptive and non-preemptive). The derivation is based only on the general structure of the generating function involved, and thus is simpler and more general than previous methods. Furthermore, applications of the method to other queueing systems are discussed. © 1990.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996