Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A summary is given of recent work on the electronic properties of quasi-two-dimensional systems, especially inversion layers in metal-insulator-semiconductor structures and electron layers on liquid helium, as reflected in papers presented at the International Conference on the Electronic Properties of Quasi-Two-Dimensional Systems held at Brown University in August, 1975. © 1976.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.