Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Paper
Recent developments in instrumentation in ellipsometry
Abstract
The present status of ellipsometric measurement capability is reviewed. Significant advances since the last ellipsometry conference are highlighted. © 1980.
Related
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
J.A. Barker, D. Henderson, et al.
Molecular Physics
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films