Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Paper
Recent developments in instrumentation in ellipsometry
Abstract
The present status of ellipsometric measurement capability is reviewed. Significant advances since the last ellipsometry conference are highlighted. © 1980.
Related
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications