About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
X‐Ray Spectrometry
Paper
Quantitative X‐ray energy dispersive analysis with the transmission electron microscope
Abstract
A Comprehensive study of the interfacing of an X‐ray energy dispersive spectrometer to a transmission electron microscope is presented. Optimum detector location, sample tilt, collimation and accelerating voltage are discussed. Quantitative elemental analysis is obtained for thin film specimens using corrections for spectrometer response, absorption and background. Peak spectra are sorted using a method of profile fitting based on nonlinear simplex minimization. Using a simple analysis scheme, the peak data is reduced to elemental composition with an accuracy and precision on the order of 1%. Examples from Fe–Ni and Ho–Co alloys are given. Copyright © 1975 Heyden & Son Limited