E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Hiroshi Ito, Reinhold Schwalm
JES
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011