Precise calibration for surface stress induced optical deflection measurements

Abstract

Powerful tools such as surface stress induced optical deflection used in bending sample methods for determination of thin films and surface stress was discussed. The bending of any given sample was measured by the deflection of reflected laser beams. It was observed that two laser beams were reflected from the sample. The results show that the sensitivity in the range of 10 v/mm can be achieved by focussing laser beams on to the PSD.