Publication
Journal of Applied Physics
Paper

Positron annihilation at the Si/SiO2 interface

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Abstract

Variable-energy positron annihilation depth-profiling has been applied to the study of the Si/SiO2 interface in Al-gate metal-oxide- semiconductor (MOS) structures. For both n- and p-type silicon under conditions of negative gate bias, the positron annihilation S-factor characteristic of the interface (Sint) is substantially modified. Temperature and annealing behavior, combined with known MOS physics, suggest strongly that S int depends directly on holes at interface states or traps at the Si/SiO2 interface.

Date

01 Dec 1992

Publication

Journal of Applied Physics

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