William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
Plasma etching — a discussion of mechanisms
Abstract
No abstract available.
Related
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
J. Tersoff
Applied Surface Science