PublicationCritical Reviews in Solid State and Materials SciencesPaperPlasma etching — a discussion of mechanismsCritical Reviews in Solid State and Materials SciencesView publicationAbstractNo abstract available.Home↳ PublicationsDate27 Sep 2006PublicationCritical Reviews in Solid State and Materials SciencesAuthorsJ.W. CoburnHarold F. WintersIBM-affiliated at time of publicationTopicsPhysical SciencesShare
