P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Plasma etching — a discussion of mechanisms
Abstract
No abstract available.
Related
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Peter J. Price
Surface Science
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings