Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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Using synchrotron radiation as the photon source, high resolution electron spectra are reported for the outermost core d levels in Pb, Sn and In me. © 1977.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
David B. Mitzi
Journal of Materials Chemistry
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Journal of Rheology
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