William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
Photochemistry of Triphenylsulfonium Salts in Poly[4-[(tert-butoxycarbonyl)oxy]styrene]: Evidence for a Dual Photoinitiation Process
Abstract
No abstract available.
Related
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Ellen J. Yoffa, David Adler
Physical Review B
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry