Heinz-Peter Schuchmann, Clemens Von Sonntag, et al.
Journal of Photochemistry and Photobiology, A: Chemistry
Silicon monoxide films (1000-5000 Å thick) are converted to silicon dioxide when irradiated in air with pulses (∼15 n half-width) of 193-nm radiation (40-110 mJ/cm2) from an excimer laser. The quantum efficiency of the process has a minimum value of 0.014.
Heinz-Peter Schuchmann, Clemens Von Sonntag, et al.
Journal of Photochemistry and Photobiology, A: Chemistry
C.D. Tesche, K.H. Brown, et al.
International Conference on Low Temperature Physics (LT) 1983
Joel Studebaker, R. Srinivasan, et al.
JACS
R. Srinivasan, Lloyd S. White, et al.
JACS